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dc.contributor.authorLevy, Lionel A.en
dc.date.accessioned2016-01-19T16:27:40Z
dc.date.available2016-01-19T16:27:40Z
dc.date.issued1989
dc.identifier.urihttp://hdl.handle.net/1842/12410
dc.description.abstracten
dc.publisherThe University of Edinburghen
dc.relation.ispartofKB thesis scanning project 2015en
dc.titleDevelopment of an electron beam testing system with industrial applications in the debug of advanced semiconductorsen
dc.typeThesis or Dissertationen
dc.type.qualificationlevelDoctoralen
dc.type.qualificationnamePhD Doctor of Philosophyen


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