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dc.contributor.authorMacDonald, Angus Josephen
dc.date.accessioned2016-01-19T16:28:19Z
dc.date.available2016-01-19T16:28:19Z
dc.date.issued1989
dc.identifier.urihttp://hdl.handle.net/1842/12495
dc.description.abstracten
dc.publisherThe University of Edinburghen
dc.relation.ispartofKB thesis scanning project 2015en
dc.titleIntegrating CAM and process simulation to enhance the analysis and control of IC fabricationen
dc.typeThesis or Dissertationen
dc.type.qualificationlevelDoctoralen
dc.type.qualificationnamePhD Doctor of Philosophyen


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