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Model of VLSI specimen charging in the scanning electron microscope

dc.contributor.authorWorlock, Stephenen
dc.date.accessioned2016-03-01T11:21:26Z
dc.date.available2016-03-01T11:21:26Z
dc.date.issued1992
dc.identifier.urihttp://hdl.handle.net/1842/14704
dc.description.abstracten
dc.publisherThe University of Edinburghen
dc.relation.ispartofKB thesis scanning project 2015en
dc.titleModel of VLSI specimen charging in the scanning electron microscopeen
dc.typeThesis or Dissertationen
dc.type.qualificationlevelDoctoralen
dc.type.qualificationnamePhD Doctor of Philosophyen


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