Sheet resistance and electrical linewidth test structures for semiconductor process characterisation
dc.contributor.author
Smith, Stewart
en
dc.date.accessioned
2015-11-04T16:06:30Z
dc.date.available
2015-11-04T16:06:30Z
dc.date.issued
2002
dc.description.abstract
en
dc.identifier.uri
http://hdl.handle.net/1842/11416
dc.publisher
The University of Edinburgh
en
dc.relation.ispartof
KB thesis scanning project 2015
en
dc.title
Sheet resistance and electrical linewidth test structures for semiconductor process characterisation
en
dc.type
Thesis or Dissertation
en
dc.type.qualificationlevel
Doctoral
en
dc.type.qualificationname
PhD Doctor of Philosophy
en
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